Lesson 10 – Integrated Process & Practical Insights

What You Will Learn

• Integrate pad, tool body, slurry, and parameters into a controlled process
• Use Zernike‑guided troubleshooting to fix form without harming cosmetics
• Balance removal rate against roughness and scratch risk
• Document changes and verify with before/after metrology
• Adopt a metrology‑first mindset for reliable outcomes

Process Integration

Polishing is simple—once you understand what happens between the tool and the workpiece. Select the right tool body and pad, set conservative starting parameters, verify metrology, and iterate with small, logged changes. Correlate signatures to mechanisms and correct efficiently.

Operator Playbook

Before changing the recipe, confirm metrology validity and environmental stability. Adjust one lever at a time (force, dwell, ratio, slurry concentration/pH) and check for expected Zernike shifts. Keep raw data and notes for audits and future runs.

Final Checks

Ensure cosmetic acceptance (scratch/dig) alongside wavefront and roughness. Confirm that edge behavior (roll or up edge) is under control and that no hidden subsurface damage remains.